4/5/2010	12:29:38 PM	SiCl4 MFC set to  200.000000
4/5/2010	12:29:48 PM	SiCl4 pre valve opened
4/5/2010	12:37:50 PM	SiCl4 pre valve closed
4/5/2010	12:37:53 PM	SiCl4 MFC set to  0.000000
4/5/2010	12:40:23 PM	SiCl4 post valve opened
4/5/2010	12:42:48 PM	Helium valve opened
4/5/2010	12:43:23 PM	Helium MFC set to  10.000000
4/5/2010	12:43:28 PM	Helium valve closed
4/5/2010	12:43:29 PM	Helium valve opened
4/5/2010	12:43:33 PM	Helium MFC set to  500.000000
4/5/2010	12:44:04 PM	Helium valve closed
4/5/2010	12:44:48 PM	Helium valve opened
4/5/2010	12:45:39 PM	SiCl4 MFC set to  500.000000
4/5/2010	12:45:41 PM	SiCl4 pre valve opened
4/5/2010	1:52:44 PM	Helium MFC set to  0.000000
4/5/2010	1:52:48 PM	SiCl4 MFC set to  0.000000
4/5/2010	1:52:50 PM	Helium valve closed
4/5/2010	1:52:59 PM	SiCl4 pre valve closed
4/5/2010	1:53:27 PM	Main Vac valve closed
4/5/2010	1:53:27 PM	Bypass valve closed
4/5/2010	1:53:32 PM	Helium MFC set to  500.000000
4/5/2010	1:53:33 PM	Helium valve opened
4/5/2010	1:54:55 PM	Helium valve closed
4/5/2010	1:55:27 PM	Bubbler valve opened
4/5/2010	1:55:31 PM	Bubbler valve closed
4/5/2010	1:56:58 PM	SiCl4 post valve closed
4/5/2010	1:57:14 PM	SiCl4 MFC set to  200.000000
4/5/2010	1:57:21 PM	SiCl4 pre valve opened
4/5/2010	1:57:37 PM	SiCl4 pre valve closed
4/5/2010	1:57:59 PM	SiCl4 pre valve opened
4/5/2010	1:58:25 PM	SiCl4 MFC set to  500.000000
4/5/2010	1:59:24 PM	H2 MFC set to  500.000000
4/5/2010	1:59:31 PM	H2 valve opened
4/5/2010	1:59:33 PM	Bubbler valve opened
4/5/2010	2:11:44 PM	SiCl4 MFC set to  325.000000
4/5/2010	2:12:26 PM	SiCl4 post valve opened
4/5/2010	2:28:24 PM	SiCl4 post valve closed
4/5/2010	2:28:24 PM	SiCl4 pre valve closed
4/5/2010	2:28:27 PM	SiCl4 MFC set to  0.000000
4/5/2010	2:28:32 PM	Tube furnace set to 750
4/5/2010	2:28:51 PM	Tube furnace set to 0
4/5/2010	2:58:51 PM	H2 valve closed
4/5/2010	2:58:53 PM	Helium valve opened
4/5/2010	2:59:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/5/2010	2:59:40 PM	Recipe started at 2:59 PM
4/5/2010	2:59:40 PM	Helium valve closed
4/5/2010	2:59:40 PM	H2 valve closed
4/5/2010	2:59:40 PM	BCl3 valve closed
4/5/2010	2:59:40 PM	PH3 valve closed
4/5/2010	2:59:40 PM	SiCl4 pre valve closed
4/5/2010	2:59:40 PM	SiCl4 post valve closed
4/5/2010	2:59:40 PM	Main Vac valve closed
4/5/2010	2:59:40 PM	Bypass valve closed
4/5/2010	2:59:40 PM	Bubbler valve closed
4/5/2010	2:59:40 PM	Helium MFC set to  0.000000
4/5/2010	2:59:40 PM	H2 MFC set to  0.000000
4/5/2010	2:59:40 PM	BCl3 MFC set to  0.000000
4/5/2010	2:59:40 PM	SiCl4 MFC set to  0.000000
4/5/2010	2:59:40 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	2:59:40 PM	Tube furnace set to 0
4/5/2010	2:59:41 PM	Run finished at 2:59 PM
4/5/2010	2:59:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/5/2010	3:00:02 PM	Recipe started at 3:00 PM
4/5/2010	3:00:02 PM	Helium valve closed
4/5/2010	3:00:02 PM	BCl3 valve closed
4/5/2010	3:00:02 PM	PH3 valve closed
4/5/2010	3:00:02 PM	SiCl4 pre valve closed
4/5/2010	3:00:02 PM	SiCl4 post valve closed
4/5/2010	3:00:02 PM	Main Vac valve closed
4/5/2010	3:00:02 PM	Bypass valve closed
4/5/2010	3:00:02 PM	Bubbler valve closed
4/5/2010	3:00:02 PM	H2 valve opened
4/5/2010	3:00:02 PM	Helium MFC set to  0.000000
4/5/2010	3:00:02 PM	H2 MFC set to  500.000000
4/5/2010	3:00:02 PM	BCl3 MFC set to  0.000000
4/5/2010	3:00:02 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:00:02 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:00:02 PM	Tube furnace set to 1000
4/5/2010	3:00:02 PM	Helium valve closed
4/5/2010	3:00:02 PM	BCl3 valve closed
4/5/2010	3:00:02 PM	PH3 valve closed
4/5/2010	3:00:02 PM	SiCl4 pre valve closed
4/5/2010	3:00:02 PM	SiCl4 post valve closed
4/5/2010	3:00:02 PM	Main Vac valve closed
4/5/2010	3:00:02 PM	Bypass valve closed
4/5/2010	3:00:02 PM	H2 valve opened
4/5/2010	3:00:02 PM	Bubbler valve opened
4/5/2010	3:00:02 PM	Helium MFC set to  0.000000
4/5/2010	3:00:02 PM	H2 MFC set to  500.000000
4/5/2010	3:00:02 PM	BCl3 MFC set to  0.000000
4/5/2010	3:00:02 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:00:02 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:00:02 PM	Tube furnace set to 1000
4/5/2010	3:09:50 PM	Helium valve closed
4/5/2010	3:09:50 PM	BCl3 valve closed
4/5/2010	3:09:50 PM	PH3 valve closed
4/5/2010	3:09:50 PM	Main Vac valve closed
4/5/2010	3:09:50 PM	Bypass valve closed
4/5/2010	3:09:50 PM	H2 valve opened
4/5/2010	3:09:50 PM	SiCl4 pre valve opened
4/5/2010	3:09:50 PM	SiCl4 post valve opened
4/5/2010	3:09:50 PM	Bubbler valve opened
4/5/2010	3:09:50 PM	Helium MFC set to  0.000000
4/5/2010	3:09:50 PM	H2 MFC set to  500.000000
4/5/2010	3:09:50 PM	BCl3 MFC set to  0.000000
4/5/2010	3:09:50 PM	SiCl4 MFC set to  325.000000
4/5/2010	3:09:50 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:09:50 PM	Tube furnace set to 1000
4/5/2010	3:18:26 PM	Helium valve closed
4/5/2010	3:18:26 PM	BCl3 valve closed
4/5/2010	3:18:26 PM	PH3 valve closed
4/5/2010	3:18:26 PM	SiCl4 pre valve closed
4/5/2010	3:18:26 PM	SiCl4 post valve closed
4/5/2010	3:18:26 PM	Main Vac valve closed
4/5/2010	3:18:26 PM	Bypass valve closed
4/5/2010	3:18:26 PM	H2 valve opened
4/5/2010	3:18:26 PM	Bubbler valve opened
4/5/2010	3:18:26 PM	Helium MFC set to  0.000000
4/5/2010	3:18:26 PM	H2 MFC set to  500.000000
4/5/2010	3:18:26 PM	BCl3 MFC set to  0.000000
4/5/2010	3:18:26 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:18:26 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:18:26 PM	Tube furnace set to 750
4/5/2010	3:19:28 PM	H2 valve closed
4/5/2010	3:19:28 PM	BCl3 valve closed
4/5/2010	3:19:28 PM	PH3 valve closed
4/5/2010	3:19:28 PM	SiCl4 pre valve closed
4/5/2010	3:19:28 PM	SiCl4 post valve closed
4/5/2010	3:19:28 PM	Main Vac valve closed
4/5/2010	3:19:28 PM	Bypass valve closed
4/5/2010	3:19:28 PM	Helium valve opened
4/5/2010	3:19:28 PM	Bubbler valve opened
4/5/2010	3:19:28 PM	Helium MFC set to  500.000000
4/5/2010	3:19:28 PM	H2 MFC set to  0.000000
4/5/2010	3:19:28 PM	BCl3 MFC set to  0.000000
4/5/2010	3:19:28 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:19:28 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:19:28 PM	Tube furnace set to 0
4/5/2010	3:21:30 PM	Run aborted at 3:21 PM
4/5/2010	3:21:30 PM	Helium valve closed
4/5/2010	3:21:30 PM	H2 valve closed
4/5/2010	3:21:30 PM	BCl3 valve closed
4/5/2010	3:21:30 PM	PH3 valve closed
4/5/2010	3:21:30 PM	SiCl4 pre valve closed
4/5/2010	3:21:30 PM	SiCl4 post valve closed
4/5/2010	3:21:30 PM	Bypass valve closed
4/5/2010	3:21:30 PM	Main Vac valve closed
4/5/2010	3:21:30 PM	Bubbler valve closed
4/5/2010	3:21:30 PM	Helium MFC set to  0.000000
4/5/2010	3:21:30 PM	H2 MFC set to  0.000000
4/5/2010	3:21:30 PM	BCl3 MFC set to  0.000000
4/5/2010	3:21:30 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:21:30 PM	Tube furnace set to 0
4/5/2010	3:21:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/5/2010	3:21:48 PM	Recipe started at 3:21 PM
4/5/2010	3:21:48 PM	Helium valve closed
4/5/2010	3:21:48 PM	H2 valve closed
4/5/2010	3:21:48 PM	BCl3 valve closed
4/5/2010	3:21:48 PM	PH3 valve closed
4/5/2010	3:21:48 PM	SiCl4 pre valve closed
4/5/2010	3:21:48 PM	SiCl4 post valve closed
4/5/2010	3:21:48 PM	Main Vac valve closed
4/5/2010	3:21:48 PM	Bypass valve closed
4/5/2010	3:21:48 PM	Bubbler valve closed
4/5/2010	3:21:48 PM	Helium MFC set to  0.000000
4/5/2010	3:21:48 PM	H2 MFC set to  0.000000
4/5/2010	3:21:48 PM	BCl3 MFC set to  0.000000
4/5/2010	3:21:48 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:21:48 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:21:48 PM	Tube furnace set to 0
4/5/2010	3:21:49 PM	Run finished at 3:21 PM
4/5/2010	3:21:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/5/2010	3:21:54 PM	Helium MFC set to  200.000000
4/5/2010	3:21:56 PM	Helium valve opened
4/5/2010	3:22:02 PM	Bubbler valve opened
4/5/2010	3:23:12 PM	Bubbler valve closed
4/5/2010	3:23:21 PM	Bubbler valve opened
4/5/2010	3:25:42 PM	Helium valve closed
4/5/2010	3:25:42 PM	H2 valve closed
4/5/2010	3:25:42 PM	BCl3 valve closed
4/5/2010	3:25:42 PM	PH3 valve closed
4/5/2010	3:25:42 PM	SiCl4 pre valve closed
4/5/2010	3:25:42 PM	SiCl4 post valve closed
4/5/2010	3:25:42 PM	Main Vac valve closed
4/5/2010	3:25:42 PM	Bubbler valve closed
4/5/2010	3:25:42 PM	Bypass valve opened
4/5/2010	3:25:42 PM	Helium MFC set to  0.000000
4/5/2010	3:25:42 PM	H2 MFC set to  0.000000
4/5/2010	3:25:42 PM	BCl3 MFC set to  0.000000
4/5/2010	3:25:42 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:25:42 PM	Bypass solenoid MFC set to  760.000000
4/5/2010	3:25:42 PM	Tube furnace set to 0
4/5/2010	3:25:42 PM	Baratron reads 975.087938 Torr.  Emergency exit.
4/5/2010	3:26:11 PM	Program exited cleanly
4/5/2010	3:26:28 PM	Program started normally
4/5/2010	3:26:28 PM	Helium valve closed
4/5/2010	3:26:28 PM	H2 valve closed
4/5/2010	3:26:28 PM	BCl3 valve closed
4/5/2010	3:26:28 PM	PH3 valve closed
4/5/2010	3:26:28 PM	SiCl4 pre valve closed
4/5/2010	3:26:28 PM	SiCl4 post valve closed
4/5/2010	3:26:28 PM	Main Vac valve closed
4/5/2010	3:26:28 PM	Bypass valve closed
4/5/2010	3:26:28 PM	Bubbler valve closed
4/5/2010	3:26:28 PM	Helium MFC set to  0.000000
4/5/2010	3:26:28 PM	H2 MFC set to  0.000000
4/5/2010	3:26:28 PM	BCl3 MFC set to  0.000000
4/5/2010	3:26:28 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:26:28 PM	Bypass solenoid MFC set to  760.000000
4/5/2010	3:26:28 PM	Tube furnace set to 0
4/5/2010	3:26:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2010	3:26:33 PM	Recipe started at 3:26 PM
4/5/2010	3:26:33 PM	Helium valve closed
4/5/2010	3:26:33 PM	H2 valve closed
4/5/2010	3:26:33 PM	BCl3 valve closed
4/5/2010	3:26:33 PM	PH3 valve closed
4/5/2010	3:26:33 PM	SiCl4 pre valve closed
4/5/2010	3:26:33 PM	SiCl4 post valve closed
4/5/2010	3:26:33 PM	Main Vac valve closed
4/5/2010	3:26:33 PM	Bubbler valve closed
4/5/2010	3:26:33 PM	Bypass valve opened
4/5/2010	3:26:33 PM	Helium MFC set to  0.000000
4/5/2010	3:26:33 PM	H2 MFC set to  0.000000
4/5/2010	3:26:33 PM	BCl3 MFC set to  0.000000
4/5/2010	3:26:33 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:26:33 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:26:33 PM	Tube furnace set to 0
4/5/2010	3:26:33 PM	Helium valve closed
4/5/2010	3:26:33 PM	H2 valve closed
4/5/2010	3:26:33 PM	BCl3 valve closed
4/5/2010	3:26:33 PM	PH3 valve closed
4/5/2010	3:26:33 PM	SiCl4 pre valve closed
4/5/2010	3:26:33 PM	SiCl4 post valve closed
4/5/2010	3:26:33 PM	Bubbler valve closed
4/5/2010	3:26:33 PM	Main Vac valve opened
4/5/2010	3:26:33 PM	Bypass valve opened
4/5/2010	3:26:33 PM	Helium MFC set to  0.000000
4/5/2010	3:26:33 PM	H2 MFC set to  0.000000
4/5/2010	3:26:33 PM	BCl3 MFC set to  0.000000
4/5/2010	3:26:33 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:26:33 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:26:33 PM	Tube furnace set to 0
4/5/2010	3:26:34 PM	Run finished at 3:26 PM
4/5/2010	3:26:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2010	3:27:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2010	3:27:19 PM	Recipe started at 3:27 PM
4/5/2010	3:27:19 PM	H2 valve closed
4/5/2010	3:27:19 PM	BCl3 valve closed
4/5/2010	3:27:19 PM	PH3 valve closed
4/5/2010	3:27:19 PM	SiCl4 pre valve closed
4/5/2010	3:27:19 PM	SiCl4 post valve closed
4/5/2010	3:27:19 PM	Main Vac valve closed
4/5/2010	3:27:19 PM	Bypass valve closed
4/5/2010	3:27:19 PM	Bubbler valve closed
4/5/2010	3:27:19 PM	Helium valve opened
4/5/2010	3:27:19 PM	Helium MFC set to  500.000000
4/5/2010	3:27:19 PM	H2 MFC set to  0.000000
4/5/2010	3:27:19 PM	BCl3 MFC set to  0.000000
4/5/2010	3:27:19 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:27:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:27:19 PM	Tube furnace set to 0
4/5/2010	3:28:33 PM	Helium valve closed
4/5/2010	3:28:33 PM	H2 valve closed
4/5/2010	3:28:33 PM	BCl3 valve closed
4/5/2010	3:28:33 PM	PH3 valve closed
4/5/2010	3:28:33 PM	SiCl4 pre valve closed
4/5/2010	3:28:33 PM	SiCl4 post valve closed
4/5/2010	3:28:33 PM	Main Vac valve closed
4/5/2010	3:28:33 PM	Bypass valve closed
4/5/2010	3:28:33 PM	Bubbler valve closed
4/5/2010	3:28:33 PM	Helium MFC set to  0.000000
4/5/2010	3:28:33 PM	H2 MFC set to  0.000000
4/5/2010	3:28:33 PM	BCl3 MFC set to  0.000000
4/5/2010	3:28:33 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:28:33 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:28:34 PM	Tube furnace set to 0
4/5/2010	3:28:34 PM	Run finished at 3:28 PM
4/5/2010	3:28:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2010	3:30:35 PM	Helium MFC set to  200.000000
4/5/2010	3:30:36 PM	Helium valve opened
4/5/2010	3:30:44 PM	Helium valve closed
4/5/2010	3:30:49 PM	Helium MFC set to  0.000000
4/5/2010	3:36:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2010	3:36:16 PM	Recipe started at 3:36 PM
4/5/2010	3:36:16 PM	Helium valve closed
4/5/2010	3:36:16 PM	H2 valve closed
4/5/2010	3:36:16 PM	BCl3 valve closed
4/5/2010	3:36:16 PM	PH3 valve closed
4/5/2010	3:36:16 PM	SiCl4 pre valve closed
4/5/2010	3:36:16 PM	SiCl4 post valve closed
4/5/2010	3:36:16 PM	Main Vac valve closed
4/5/2010	3:36:16 PM	Bubbler valve closed
4/5/2010	3:36:16 PM	Bypass valve opened
4/5/2010	3:36:16 PM	Helium MFC set to  0.000000
4/5/2010	3:36:16 PM	H2 MFC set to  0.000000
4/5/2010	3:36:16 PM	BCl3 MFC set to  0.000000
4/5/2010	3:36:16 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:36:16 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:36:16 PM	Tube furnace set to 0
4/5/2010	3:37:14 PM	Helium valve closed
4/5/2010	3:37:14 PM	H2 valve closed
4/5/2010	3:37:14 PM	BCl3 valve closed
4/5/2010	3:37:14 PM	PH3 valve closed
4/5/2010	3:37:14 PM	SiCl4 pre valve closed
4/5/2010	3:37:14 PM	SiCl4 post valve closed
4/5/2010	3:37:14 PM	Bubbler valve closed
4/5/2010	3:37:14 PM	Main Vac valve opened
4/5/2010	3:37:14 PM	Bypass valve opened
4/5/2010	3:37:14 PM	Helium MFC set to  0.000000
4/5/2010	3:37:14 PM	H2 MFC set to  0.000000
4/5/2010	3:37:14 PM	BCl3 MFC set to  0.000000
4/5/2010	3:37:14 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:37:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:37:14 PM	Tube furnace set to 0
4/5/2010	3:37:14 PM	Run finished at 3:37 PM
4/5/2010	3:37:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2010	3:39:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/5/2010	3:39:30 PM	Recipe started at 3:39 PM
4/5/2010	3:39:30 PM	H2 valve closed
4/5/2010	3:39:30 PM	BCl3 valve closed
4/5/2010	3:39:30 PM	PH3 valve closed
4/5/2010	3:39:30 PM	SiCl4 pre valve closed
4/5/2010	3:39:30 PM	SiCl4 post valve closed
4/5/2010	3:39:30 PM	Main Vac valve closed
4/5/2010	3:39:30 PM	Bypass valve closed
4/5/2010	3:39:30 PM	Bubbler valve closed
4/5/2010	3:39:30 PM	Helium valve opened
4/5/2010	3:39:30 PM	Helium MFC set to  500.000000
4/5/2010	3:39:30 PM	H2 MFC set to  0.000000
4/5/2010	3:39:30 PM	BCl3 MFC set to  0.000000
4/5/2010	3:39:30 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:39:30 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:39:30 PM	Tube furnace set to 0
4/5/2010	3:40:49 PM	Helium valve closed
4/5/2010	3:40:49 PM	H2 valve closed
4/5/2010	3:40:49 PM	BCl3 valve closed
4/5/2010	3:40:49 PM	PH3 valve closed
4/5/2010	3:40:49 PM	SiCl4 pre valve closed
4/5/2010	3:40:49 PM	SiCl4 post valve closed
4/5/2010	3:40:49 PM	Main Vac valve closed
4/5/2010	3:40:49 PM	Bypass valve closed
4/5/2010	3:40:49 PM	Bubbler valve closed
4/5/2010	3:40:49 PM	Helium MFC set to  0.000000
4/5/2010	3:40:49 PM	H2 MFC set to  0.000000
4/5/2010	3:40:49 PM	BCl3 MFC set to  0.000000
4/5/2010	3:40:49 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:40:49 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:40:49 PM	Tube furnace set to 0
4/5/2010	3:41:04 PM	Helium valve closed
4/5/2010	3:41:04 PM	H2 valve closed
4/5/2010	3:41:04 PM	BCl3 valve closed
4/5/2010	3:41:04 PM	PH3 valve closed
4/5/2010	3:41:04 PM	SiCl4 pre valve closed
4/5/2010	3:41:04 PM	SiCl4 post valve closed
4/5/2010	3:41:04 PM	Main Vac valve closed
4/5/2010	3:41:04 PM	Bubbler valve closed
4/5/2010	3:41:04 PM	Bypass valve opened
4/5/2010	3:41:04 PM	Helium MFC set to  0.000000
4/5/2010	3:41:04 PM	H2 MFC set to  0.000000
4/5/2010	3:41:04 PM	BCl3 MFC set to  0.000000
4/5/2010	3:41:04 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:41:04 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:41:04 PM	Tube furnace set to 0
4/5/2010	3:41:26 PM	Helium valve closed
4/5/2010	3:41:26 PM	H2 valve closed
4/5/2010	3:41:26 PM	BCl3 valve closed
4/5/2010	3:41:26 PM	PH3 valve closed
4/5/2010	3:41:26 PM	SiCl4 pre valve closed
4/5/2010	3:41:26 PM	SiCl4 post valve closed
4/5/2010	3:41:26 PM	Bubbler valve closed
4/5/2010	3:41:26 PM	Main Vac valve opened
4/5/2010	3:41:26 PM	Bypass valve opened
4/5/2010	3:41:26 PM	Helium MFC set to  0.000000
4/5/2010	3:41:26 PM	H2 MFC set to  0.000000
4/5/2010	3:41:26 PM	BCl3 MFC set to  0.000000
4/5/2010	3:41:26 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:41:26 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:41:26 PM	Tube furnace set to 0
4/5/2010	3:46:26 PM	H2 valve closed
4/5/2010	3:46:26 PM	BCl3 valve closed
4/5/2010	3:46:26 PM	PH3 valve closed
4/5/2010	3:46:26 PM	SiCl4 pre valve closed
4/5/2010	3:46:26 PM	SiCl4 post valve closed
4/5/2010	3:46:26 PM	Main Vac valve closed
4/5/2010	3:46:26 PM	Bypass valve closed
4/5/2010	3:46:26 PM	Bubbler valve closed
4/5/2010	3:46:26 PM	Helium valve opened
4/5/2010	3:46:26 PM	Helium MFC set to  500.000000
4/5/2010	3:46:26 PM	H2 MFC set to  0.000000
4/5/2010	3:46:26 PM	BCl3 MFC set to  0.000000
4/5/2010	3:46:26 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:46:26 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:46:26 PM	Tube furnace set to 0
4/5/2010	3:47:43 PM	Helium valve closed
4/5/2010	3:47:43 PM	H2 valve closed
4/5/2010	3:47:43 PM	BCl3 valve closed
4/5/2010	3:47:43 PM	PH3 valve closed
4/5/2010	3:47:43 PM	SiCl4 pre valve closed
4/5/2010	3:47:43 PM	SiCl4 post valve closed
4/5/2010	3:47:43 PM	Main Vac valve closed
4/5/2010	3:47:43 PM	Bypass valve closed
4/5/2010	3:47:43 PM	Bubbler valve closed
4/5/2010	3:47:43 PM	Helium MFC set to  0.000000
4/5/2010	3:47:43 PM	H2 MFC set to  0.000000
4/5/2010	3:47:43 PM	BCl3 MFC set to  0.000000
4/5/2010	3:47:43 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:47:43 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:47:43 PM	Tube furnace set to 0
4/5/2010	3:47:58 PM	Helium valve closed
4/5/2010	3:47:58 PM	H2 valve closed
4/5/2010	3:47:58 PM	BCl3 valve closed
4/5/2010	3:47:58 PM	PH3 valve closed
4/5/2010	3:47:58 PM	SiCl4 pre valve closed
4/5/2010	3:47:58 PM	SiCl4 post valve closed
4/5/2010	3:47:58 PM	Main Vac valve closed
4/5/2010	3:47:58 PM	Bubbler valve closed
4/5/2010	3:47:58 PM	Bypass valve opened
4/5/2010	3:47:58 PM	Helium MFC set to  0.000000
4/5/2010	3:47:58 PM	H2 MFC set to  0.000000
4/5/2010	3:47:58 PM	BCl3 MFC set to  0.000000
4/5/2010	3:47:58 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:47:58 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:47:58 PM	Tube furnace set to 0
4/5/2010	3:48:20 PM	Helium valve closed
4/5/2010	3:48:20 PM	H2 valve closed
4/5/2010	3:48:20 PM	BCl3 valve closed
4/5/2010	3:48:20 PM	PH3 valve closed
4/5/2010	3:48:20 PM	SiCl4 pre valve closed
4/5/2010	3:48:20 PM	SiCl4 post valve closed
4/5/2010	3:48:20 PM	Bubbler valve closed
4/5/2010	3:48:20 PM	Main Vac valve opened
4/5/2010	3:48:20 PM	Bypass valve opened
4/5/2010	3:48:20 PM	Helium MFC set to  0.000000
4/5/2010	3:48:20 PM	H2 MFC set to  0.000000
4/5/2010	3:48:20 PM	BCl3 MFC set to  0.000000
4/5/2010	3:48:20 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:48:20 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:48:20 PM	Tube furnace set to 0
4/5/2010	3:53:20 PM	H2 valve closed
4/5/2010	3:53:20 PM	BCl3 valve closed
4/5/2010	3:53:20 PM	PH3 valve closed
4/5/2010	3:53:20 PM	SiCl4 pre valve closed
4/5/2010	3:53:20 PM	SiCl4 post valve closed
4/5/2010	3:53:20 PM	Main Vac valve closed
4/5/2010	3:53:20 PM	Bypass valve closed
4/5/2010	3:53:20 PM	Bubbler valve closed
4/5/2010	3:53:20 PM	Helium valve opened
4/5/2010	3:53:20 PM	Helium MFC set to  500.000000
4/5/2010	3:53:20 PM	H2 MFC set to  0.000000
4/5/2010	3:53:20 PM	BCl3 MFC set to  0.000000
4/5/2010	3:53:20 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:53:20 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:53:20 PM	Tube furnace set to 0
4/5/2010	3:54:37 PM	Helium valve closed
4/5/2010	3:54:37 PM	H2 valve closed
4/5/2010	3:54:37 PM	BCl3 valve closed
4/5/2010	3:54:37 PM	PH3 valve closed
4/5/2010	3:54:37 PM	SiCl4 pre valve closed
4/5/2010	3:54:37 PM	SiCl4 post valve closed
4/5/2010	3:54:37 PM	Main Vac valve closed
4/5/2010	3:54:37 PM	Bypass valve closed
4/5/2010	3:54:37 PM	Bubbler valve closed
4/5/2010	3:54:37 PM	Helium MFC set to  0.000000
4/5/2010	3:54:37 PM	H2 MFC set to  0.000000
4/5/2010	3:54:37 PM	BCl3 MFC set to  0.000000
4/5/2010	3:54:37 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:54:37 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:54:37 PM	Tube furnace set to 0
4/5/2010	3:54:52 PM	Helium valve closed
4/5/2010	3:54:52 PM	H2 valve closed
4/5/2010	3:54:52 PM	BCl3 valve closed
4/5/2010	3:54:52 PM	PH3 valve closed
4/5/2010	3:54:52 PM	SiCl4 pre valve closed
4/5/2010	3:54:52 PM	SiCl4 post valve closed
4/5/2010	3:54:52 PM	Main Vac valve closed
4/5/2010	3:54:52 PM	Bubbler valve closed
4/5/2010	3:54:52 PM	Bypass valve opened
4/5/2010	3:54:52 PM	Helium MFC set to  0.000000
4/5/2010	3:54:52 PM	H2 MFC set to  0.000000
4/5/2010	3:54:52 PM	BCl3 MFC set to  0.000000
4/5/2010	3:54:52 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:54:52 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:54:52 PM	Tube furnace set to 0
4/5/2010	3:55:14 PM	Helium valve closed
4/5/2010	3:55:14 PM	H2 valve closed
4/5/2010	3:55:14 PM	BCl3 valve closed
4/5/2010	3:55:14 PM	PH3 valve closed
4/5/2010	3:55:14 PM	SiCl4 pre valve closed
4/5/2010	3:55:14 PM	SiCl4 post valve closed
4/5/2010	3:55:14 PM	Bubbler valve closed
4/5/2010	3:55:14 PM	Main Vac valve opened
4/5/2010	3:55:14 PM	Bypass valve opened
4/5/2010	3:55:14 PM	Helium MFC set to  0.000000
4/5/2010	3:55:14 PM	H2 MFC set to  0.000000
4/5/2010	3:55:14 PM	BCl3 MFC set to  0.000000
4/5/2010	3:55:14 PM	SiCl4 MFC set to  0.000000
4/5/2010	3:55:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	3:55:14 PM	Tube furnace set to 0
4/5/2010	4:00:14 PM	Helium valve closed
4/5/2010	4:00:14 PM	H2 valve closed
4/5/2010	4:00:14 PM	BCl3 valve closed
4/5/2010	4:00:14 PM	PH3 valve closed
4/5/2010	4:00:14 PM	SiCl4 pre valve closed
4/5/2010	4:00:14 PM	SiCl4 post valve closed
4/5/2010	4:00:14 PM	Bubbler valve closed
4/5/2010	4:00:14 PM	Main Vac valve opened
4/5/2010	4:00:14 PM	Bypass valve opened
4/5/2010	4:00:14 PM	Helium MFC set to  0.000000
4/5/2010	4:00:14 PM	H2 MFC set to  0.000000
4/5/2010	4:00:14 PM	BCl3 MFC set to  0.000000
4/5/2010	4:00:14 PM	SiCl4 MFC set to  0.000000
4/5/2010	4:00:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	4:00:14 PM	Tube furnace set to 0
4/5/2010	4:00:15 PM	Run finished at 4:00 PM
4/5/2010	4:00:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/5/2010	5:23:11 PM	SiCl4 post valve opened
4/5/2010	5:23:12 PM	SiCl4 post valve closed
4/5/2010	5:23:33 PM	SiCl4 pre valve opened
4/5/2010	5:23:33 PM	SiCl4 pre valve closed
4/5/2010	5:24:05 PM	Recipe started at 5:24 PM
4/5/2010	5:24:05 PM	Helium valve closed
4/5/2010	5:24:05 PM	BCl3 valve closed
4/5/2010	5:24:05 PM	PH3 valve closed
4/5/2010	5:24:05 PM	SiCl4 pre valve closed
4/5/2010	5:24:05 PM	SiCl4 post valve closed
4/5/2010	5:24:05 PM	Main Vac valve closed
4/5/2010	5:24:05 PM	Bypass valve closed
4/5/2010	5:24:05 PM	Bubbler valve closed
4/5/2010	5:24:05 PM	H2 valve opened
4/5/2010	5:24:05 PM	Helium MFC set to  0.000000
4/5/2010	5:24:05 PM	H2 MFC set to  500.000000
4/5/2010	5:24:05 PM	BCl3 MFC set to  0.000000
4/5/2010	5:24:05 PM	SiCl4 MFC set to  0.000000
4/5/2010	5:24:05 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	5:24:05 PM	Tube furnace set to 1000
4/5/2010	5:25:24 PM	Helium valve closed
4/5/2010	5:25:24 PM	BCl3 valve closed
4/5/2010	5:25:24 PM	PH3 valve closed
4/5/2010	5:25:24 PM	SiCl4 pre valve closed
4/5/2010	5:25:24 PM	SiCl4 post valve closed
4/5/2010	5:25:24 PM	Main Vac valve closed
4/5/2010	5:25:24 PM	Bypass valve closed
4/5/2010	5:25:24 PM	H2 valve opened
4/5/2010	5:25:24 PM	Bubbler valve opened
4/5/2010	5:25:24 PM	Helium MFC set to  0.000000
4/5/2010	5:25:24 PM	H2 MFC set to  500.000000
4/5/2010	5:25:24 PM	BCl3 MFC set to  0.000000
4/5/2010	5:25:24 PM	SiCl4 MFC set to  0.000000
4/5/2010	5:25:24 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	5:25:25 PM	Tube furnace set to 1000
4/5/2010	5:45:24 PM	Helium valve closed
4/5/2010	5:45:24 PM	BCl3 valve closed
4/5/2010	5:45:24 PM	PH3 valve closed
4/5/2010	5:45:24 PM	Main Vac valve closed
4/5/2010	5:45:24 PM	Bypass valve closed
4/5/2010	5:45:24 PM	H2 valve opened
4/5/2010	5:45:24 PM	SiCl4 pre valve opened
4/5/2010	5:45:24 PM	SiCl4 post valve opened
4/5/2010	5:45:24 PM	Bubbler valve opened
4/5/2010	5:45:24 PM	Helium MFC set to  0.000000
4/5/2010	5:45:25 PM	H2 MFC set to  500.000000
4/5/2010	5:45:25 PM	BCl3 MFC set to  0.000000
4/5/2010	5:45:25 PM	SiCl4 MFC set to  325.000000
4/5/2010	5:45:25 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	5:45:25 PM	Tube furnace set to 1000
4/5/2010	6:05:25 PM	Helium valve closed
4/5/2010	6:05:25 PM	BCl3 valve closed
4/5/2010	6:05:25 PM	PH3 valve closed
4/5/2010	6:05:25 PM	SiCl4 pre valve closed
4/5/2010	6:05:25 PM	SiCl4 post valve closed
4/5/2010	6:05:25 PM	Main Vac valve closed
4/5/2010	6:05:25 PM	Bypass valve closed
4/5/2010	6:05:25 PM	H2 valve opened
4/5/2010	6:05:25 PM	Bubbler valve opened
4/5/2010	6:05:25 PM	Helium MFC set to  0.000000
4/5/2010	6:05:25 PM	H2 MFC set to  500.000000
4/5/2010	6:05:25 PM	BCl3 MFC set to  0.000000
4/5/2010	6:05:25 PM	SiCl4 MFC set to  0.000000
4/5/2010	6:05:25 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	6:05:25 PM	Tube furnace set to 750
4/5/2010	6:25:25 PM	H2 valve closed
4/5/2010	6:25:25 PM	BCl3 valve closed
4/5/2010	6:25:25 PM	PH3 valve closed
4/5/2010	6:25:25 PM	SiCl4 pre valve closed
4/5/2010	6:25:25 PM	SiCl4 post valve closed
4/5/2010	6:25:25 PM	Main Vac valve closed
4/5/2010	6:25:25 PM	Bypass valve closed
4/5/2010	6:25:25 PM	Helium valve opened
4/5/2010	6:25:25 PM	Bubbler valve opened
4/5/2010	6:25:25 PM	Helium MFC set to  500.000000
4/5/2010	6:25:25 PM	H2 MFC set to  0.000000
4/5/2010	6:25:25 PM	BCl3 MFC set to  0.000000
4/5/2010	6:25:25 PM	SiCl4 MFC set to  0.000000
4/5/2010	6:25:25 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	6:25:25 PM	Tube furnace set to 0
4/5/2010	6:45:25 PM	Helium valve closed
4/5/2010	6:45:25 PM	H2 valve closed
4/5/2010	6:45:25 PM	BCl3 valve closed
4/5/2010	6:45:25 PM	PH3 valve closed
4/5/2010	6:45:25 PM	SiCl4 pre valve closed
4/5/2010	6:45:25 PM	SiCl4 post valve closed
4/5/2010	6:45:25 PM	Main Vac valve closed
4/5/2010	6:45:25 PM	Bypass valve closed
4/5/2010	6:45:25 PM	Bubbler valve closed
4/5/2010	6:45:25 PM	Helium MFC set to  0.000000
4/5/2010	6:45:25 PM	H2 MFC set to  0.000000
4/5/2010	6:45:25 PM	BCl3 MFC set to  0.000000
4/5/2010	6:45:25 PM	SiCl4 MFC set to  0.000000
4/5/2010	6:45:25 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	6:45:25 PM	Tube furnace set to 0
4/5/2010	6:45:25 PM	Run finished at 6:45 PM
4/5/2010	7:12:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2010	7:12:48 PM	Recipe started at 7:12 PM
4/5/2010	7:12:48 PM	Helium valve closed
4/5/2010	7:12:49 PM	H2 valve closed
4/5/2010	7:12:49 PM	BCl3 valve closed
4/5/2010	7:12:49 PM	PH3 valve closed
4/5/2010	7:12:49 PM	SiCl4 pre valve closed
4/5/2010	7:12:49 PM	SiCl4 post valve closed
4/5/2010	7:12:49 PM	Main Vac valve closed
4/5/2010	7:12:49 PM	Bubbler valve closed
4/5/2010	7:12:49 PM	Bypass valve opened
4/5/2010	7:12:49 PM	Helium MFC set to  0.000000
4/5/2010	7:12:49 PM	H2 MFC set to  0.000000
4/5/2010	7:12:49 PM	BCl3 MFC set to  0.000000
4/5/2010	7:12:49 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:12:49 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:12:49 PM	Tube furnace set to 0
4/5/2010	7:13:21 PM	Helium valve closed
4/5/2010	7:13:21 PM	H2 valve closed
4/5/2010	7:13:21 PM	BCl3 valve closed
4/5/2010	7:13:21 PM	PH3 valve closed
4/5/2010	7:13:21 PM	SiCl4 pre valve closed
4/5/2010	7:13:21 PM	SiCl4 post valve closed
4/5/2010	7:13:21 PM	Bubbler valve closed
4/5/2010	7:13:21 PM	Main Vac valve opened
4/5/2010	7:13:21 PM	Bypass valve opened
4/5/2010	7:13:21 PM	Helium MFC set to  0.000000
4/5/2010	7:13:21 PM	H2 MFC set to  0.000000
4/5/2010	7:13:21 PM	BCl3 MFC set to  0.000000
4/5/2010	7:13:21 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:13:21 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:13:21 PM	Tube furnace set to 0
4/5/2010	7:13:21 PM	Run finished at 7:13 PM
4/5/2010	7:13:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2010	7:15:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/5/2010	7:15:21 PM	Recipe started at 7:15 PM
4/5/2010	7:15:21 PM	H2 valve closed
4/5/2010	7:15:21 PM	BCl3 valve closed
4/5/2010	7:15:21 PM	PH3 valve closed
4/5/2010	7:15:21 PM	SiCl4 pre valve closed
4/5/2010	7:15:21 PM	SiCl4 post valve closed
4/5/2010	7:15:21 PM	Main Vac valve closed
4/5/2010	7:15:21 PM	Bypass valve closed
4/5/2010	7:15:21 PM	Bubbler valve closed
4/5/2010	7:15:21 PM	Helium valve opened
4/5/2010	7:15:21 PM	Helium MFC set to  500.000000
4/5/2010	7:15:21 PM	H2 MFC set to  0.000000
4/5/2010	7:15:21 PM	BCl3 MFC set to  0.000000
4/5/2010	7:15:21 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:15:21 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:15:22 PM	Tube furnace set to 0
4/5/2010	7:16:43 PM	Helium valve closed
4/5/2010	7:16:43 PM	H2 valve closed
4/5/2010	7:16:43 PM	BCl3 valve closed
4/5/2010	7:16:43 PM	PH3 valve closed
4/5/2010	7:16:43 PM	SiCl4 pre valve closed
4/5/2010	7:16:43 PM	SiCl4 post valve closed
4/5/2010	7:16:43 PM	Main Vac valve closed
4/5/2010	7:16:43 PM	Bypass valve closed
4/5/2010	7:16:43 PM	Bubbler valve closed
4/5/2010	7:16:43 PM	Helium MFC set to  0.000000
4/5/2010	7:16:43 PM	H2 MFC set to  0.000000
4/5/2010	7:16:43 PM	BCl3 MFC set to  0.000000
4/5/2010	7:16:43 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:16:43 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:16:43 PM	Tube furnace set to 0
4/5/2010	7:16:58 PM	Helium valve closed
4/5/2010	7:16:58 PM	H2 valve closed
4/5/2010	7:16:58 PM	BCl3 valve closed
4/5/2010	7:16:58 PM	PH3 valve closed
4/5/2010	7:16:58 PM	SiCl4 pre valve closed
4/5/2010	7:16:58 PM	SiCl4 post valve closed
4/5/2010	7:16:58 PM	Main Vac valve closed
4/5/2010	7:16:58 PM	Bubbler valve closed
4/5/2010	7:16:58 PM	Bypass valve opened
4/5/2010	7:16:58 PM	Helium MFC set to  0.000000
4/5/2010	7:16:58 PM	H2 MFC set to  0.000000
4/5/2010	7:16:58 PM	BCl3 MFC set to  0.000000
4/5/2010	7:16:58 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:16:58 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:16:58 PM	Tube furnace set to 0
4/5/2010	7:17:21 PM	Helium valve closed
4/5/2010	7:17:21 PM	H2 valve closed
4/5/2010	7:17:21 PM	BCl3 valve closed
4/5/2010	7:17:21 PM	PH3 valve closed
4/5/2010	7:17:21 PM	SiCl4 pre valve closed
4/5/2010	7:17:21 PM	SiCl4 post valve closed
4/5/2010	7:17:21 PM	Bubbler valve closed
4/5/2010	7:17:21 PM	Main Vac valve opened
4/5/2010	7:17:21 PM	Bypass valve opened
4/5/2010	7:17:21 PM	Helium MFC set to  0.000000
4/5/2010	7:17:21 PM	H2 MFC set to  0.000000
4/5/2010	7:17:21 PM	BCl3 MFC set to  0.000000
4/5/2010	7:17:21 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:17:21 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:17:21 PM	Tube furnace set to 0
4/5/2010	7:22:21 PM	H2 valve closed
4/5/2010	7:22:21 PM	BCl3 valve closed
4/5/2010	7:22:21 PM	PH3 valve closed
4/5/2010	7:22:21 PM	SiCl4 pre valve closed
4/5/2010	7:22:21 PM	SiCl4 post valve closed
4/5/2010	7:22:21 PM	Main Vac valve closed
4/5/2010	7:22:21 PM	Bypass valve closed
4/5/2010	7:22:21 PM	Bubbler valve closed
4/5/2010	7:22:21 PM	Helium valve opened
4/5/2010	7:22:21 PM	Helium MFC set to  500.000000
4/5/2010	7:22:21 PM	H2 MFC set to  0.000000
4/5/2010	7:22:21 PM	BCl3 MFC set to  0.000000
4/5/2010	7:22:21 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:22:21 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:22:21 PM	Tube furnace set to 0
4/5/2010	7:23:43 PM	Helium valve closed
4/5/2010	7:23:43 PM	H2 valve closed
4/5/2010	7:23:43 PM	BCl3 valve closed
4/5/2010	7:23:43 PM	PH3 valve closed
4/5/2010	7:23:43 PM	SiCl4 pre valve closed
4/5/2010	7:23:43 PM	SiCl4 post valve closed
4/5/2010	7:23:43 PM	Main Vac valve closed
4/5/2010	7:23:43 PM	Bypass valve closed
4/5/2010	7:23:43 PM	Bubbler valve closed
4/5/2010	7:23:43 PM	Helium MFC set to  0.000000
4/5/2010	7:23:43 PM	H2 MFC set to  0.000000
4/5/2010	7:23:43 PM	BCl3 MFC set to  0.000000
4/5/2010	7:23:43 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:23:43 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:23:43 PM	Tube furnace set to 0
4/5/2010	7:23:58 PM	Helium valve closed
4/5/2010	7:23:58 PM	H2 valve closed
4/5/2010	7:23:58 PM	BCl3 valve closed
4/5/2010	7:23:58 PM	PH3 valve closed
4/5/2010	7:23:58 PM	SiCl4 pre valve closed
4/5/2010	7:23:58 PM	SiCl4 post valve closed
4/5/2010	7:23:58 PM	Main Vac valve closed
4/5/2010	7:23:58 PM	Bubbler valve closed
4/5/2010	7:23:58 PM	Bypass valve opened
4/5/2010	7:23:58 PM	Helium MFC set to  0.000000
4/5/2010	7:23:58 PM	H2 MFC set to  0.000000
4/5/2010	7:23:58 PM	BCl3 MFC set to  0.000000
4/5/2010	7:23:58 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:23:58 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:23:58 PM	Tube furnace set to 0
4/5/2010	7:24:20 PM	Helium valve closed
4/5/2010	7:24:20 PM	H2 valve closed
4/5/2010	7:24:20 PM	BCl3 valve closed
4/5/2010	7:24:20 PM	PH3 valve closed
4/5/2010	7:24:20 PM	SiCl4 pre valve closed
4/5/2010	7:24:20 PM	SiCl4 post valve closed
4/5/2010	7:24:20 PM	Bubbler valve closed
4/5/2010	7:24:20 PM	Main Vac valve opened
4/5/2010	7:24:20 PM	Bypass valve opened
4/5/2010	7:24:20 PM	Helium MFC set to  0.000000
4/5/2010	7:24:20 PM	H2 MFC set to  0.000000
4/5/2010	7:24:20 PM	BCl3 MFC set to  0.000000
4/5/2010	7:24:20 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:24:20 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:24:20 PM	Tube furnace set to 0
4/5/2010	7:29:20 PM	H2 valve closed
4/5/2010	7:29:20 PM	BCl3 valve closed
4/5/2010	7:29:20 PM	PH3 valve closed
4/5/2010	7:29:20 PM	SiCl4 pre valve closed
4/5/2010	7:29:20 PM	SiCl4 post valve closed
4/5/2010	7:29:20 PM	Main Vac valve closed
4/5/2010	7:29:20 PM	Bypass valve closed
4/5/2010	7:29:20 PM	Bubbler valve closed
4/5/2010	7:29:20 PM	Helium valve opened
4/5/2010	7:29:20 PM	Helium MFC set to  500.000000
4/5/2010	7:29:20 PM	H2 MFC set to  0.000000
4/5/2010	7:29:20 PM	BCl3 MFC set to  0.000000
4/5/2010	7:29:20 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:29:20 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:29:21 PM	Tube furnace set to 0
4/5/2010	7:30:42 PM	Helium valve closed
4/5/2010	7:30:42 PM	H2 valve closed
4/5/2010	7:30:42 PM	BCl3 valve closed
4/5/2010	7:30:42 PM	PH3 valve closed
4/5/2010	7:30:42 PM	SiCl4 pre valve closed
4/5/2010	7:30:42 PM	SiCl4 post valve closed
4/5/2010	7:30:42 PM	Main Vac valve closed
4/5/2010	7:30:42 PM	Bypass valve closed
4/5/2010	7:30:42 PM	Bubbler valve closed
4/5/2010	7:30:42 PM	Helium MFC set to  0.000000
4/5/2010	7:30:42 PM	H2 MFC set to  0.000000
4/5/2010	7:30:42 PM	BCl3 MFC set to  0.000000
4/5/2010	7:30:42 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:30:42 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:30:42 PM	Tube furnace set to 0
4/5/2010	7:30:57 PM	Helium valve closed
4/5/2010	7:30:57 PM	H2 valve closed
4/5/2010	7:30:57 PM	BCl3 valve closed
4/5/2010	7:30:57 PM	PH3 valve closed
4/5/2010	7:30:57 PM	SiCl4 pre valve closed
4/5/2010	7:30:57 PM	SiCl4 post valve closed
4/5/2010	7:30:57 PM	Main Vac valve closed
4/5/2010	7:30:57 PM	Bubbler valve closed
4/5/2010	7:30:57 PM	Bypass valve opened
4/5/2010	7:30:57 PM	Helium MFC set to  0.000000
4/5/2010	7:30:57 PM	H2 MFC set to  0.000000
4/5/2010	7:30:57 PM	BCl3 MFC set to  0.000000
4/5/2010	7:30:57 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:30:57 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:30:57 PM	Tube furnace set to 0
4/5/2010	7:31:19 PM	Helium valve closed
4/5/2010	7:31:19 PM	H2 valve closed
4/5/2010	7:31:19 PM	BCl3 valve closed
4/5/2010	7:31:19 PM	PH3 valve closed
4/5/2010	7:31:19 PM	SiCl4 pre valve closed
4/5/2010	7:31:19 PM	SiCl4 post valve closed
4/5/2010	7:31:19 PM	Bubbler valve closed
4/5/2010	7:31:19 PM	Main Vac valve opened
4/5/2010	7:31:19 PM	Bypass valve opened
4/5/2010	7:31:19 PM	Helium MFC set to  0.000000
4/5/2010	7:31:19 PM	H2 MFC set to  0.000000
4/5/2010	7:31:19 PM	BCl3 MFC set to  0.000000
4/5/2010	7:31:19 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:31:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:31:20 PM	Tube furnace set to 0
4/5/2010	7:36:20 PM	Helium valve closed
4/5/2010	7:36:20 PM	H2 valve closed
4/5/2010	7:36:20 PM	BCl3 valve closed
4/5/2010	7:36:20 PM	PH3 valve closed
4/5/2010	7:36:20 PM	SiCl4 pre valve closed
4/5/2010	7:36:20 PM	SiCl4 post valve closed
4/5/2010	7:36:20 PM	Bubbler valve closed
4/5/2010	7:36:20 PM	Main Vac valve opened
4/5/2010	7:36:20 PM	Bypass valve opened
4/5/2010	7:36:20 PM	Helium MFC set to  0.000000
4/5/2010	7:36:20 PM	H2 MFC set to  0.000000
4/5/2010	7:36:20 PM	BCl3 MFC set to  0.000000
4/5/2010	7:36:20 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:36:20 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:36:20 PM	Tube furnace set to 0
4/5/2010	7:36:21 PM	Run finished at 7:36 PM
4/5/2010	7:36:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/5/2010	7:40:34 PM	Main Vac valve closed
4/5/2010	7:40:36 PM	Bypass valve closed
4/5/2010	7:40:46 PM	Bypass valve opened
4/5/2010	7:40:47 PM	Main Vac valve opened
4/5/2010	7:47:29 PM	Main Vac valve closed
4/5/2010	7:47:30 PM	Bypass valve closed
4/5/2010	7:48:55 PM	Bypass valve opened
4/5/2010	7:48:56 PM	Main Vac valve opened
4/5/2010	7:49:04 PM	Recipe started at 7:49 PM
4/5/2010	7:49:04 PM	Helium valve closed
4/5/2010	7:49:04 PM	BCl3 valve closed
4/5/2010	7:49:04 PM	PH3 valve closed
4/5/2010	7:49:04 PM	SiCl4 pre valve closed
4/5/2010	7:49:04 PM	SiCl4 post valve closed
4/5/2010	7:49:04 PM	Main Vac valve closed
4/5/2010	7:49:04 PM	Bypass valve closed
4/5/2010	7:49:04 PM	Bubbler valve closed
4/5/2010	7:49:04 PM	H2 valve opened
4/5/2010	7:49:04 PM	Helium MFC set to  0.000000
4/5/2010	7:49:04 PM	H2 MFC set to  500.000000
4/5/2010	7:49:04 PM	BCl3 MFC set to  0.000000
4/5/2010	7:49:04 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:49:04 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:49:04 PM	Tube furnace set to 1000
4/5/2010	7:50:24 PM	Helium valve closed
4/5/2010	7:50:24 PM	BCl3 valve closed
4/5/2010	7:50:24 PM	PH3 valve closed
4/5/2010	7:50:24 PM	SiCl4 pre valve closed
4/5/2010	7:50:24 PM	SiCl4 post valve closed
4/5/2010	7:50:24 PM	Main Vac valve closed
4/5/2010	7:50:24 PM	Bypass valve closed
4/5/2010	7:50:24 PM	H2 valve opened
4/5/2010	7:50:24 PM	Bubbler valve opened
4/5/2010	7:50:24 PM	Helium MFC set to  0.000000
4/5/2010	7:50:24 PM	H2 MFC set to  500.000000
4/5/2010	7:50:24 PM	BCl3 MFC set to  0.000000
4/5/2010	7:50:24 PM	SiCl4 MFC set to  0.000000
4/5/2010	7:50:24 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	7:50:24 PM	Tube furnace set to 1000
4/5/2010	8:10:24 PM	Helium valve closed
4/5/2010	8:10:24 PM	BCl3 valve closed
4/5/2010	8:10:24 PM	PH3 valve closed
4/5/2010	8:10:24 PM	Main Vac valve closed
4/5/2010	8:10:24 PM	Bypass valve closed
4/5/2010	8:10:24 PM	H2 valve opened
4/5/2010	8:10:24 PM	SiCl4 pre valve opened
4/5/2010	8:10:24 PM	SiCl4 post valve opened
4/5/2010	8:10:24 PM	Bubbler valve opened
4/5/2010	8:10:24 PM	Helium MFC set to  0.000000
4/5/2010	8:10:24 PM	H2 MFC set to  500.000000
4/5/2010	8:10:24 PM	BCl3 MFC set to  0.000000
4/5/2010	8:10:24 PM	SiCl4 MFC set to  400.000000
4/5/2010	8:10:24 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	8:10:25 PM	Tube furnace set to 1000
4/5/2010	8:25:24 PM	Helium valve closed
4/5/2010	8:25:24 PM	BCl3 valve closed
4/5/2010	8:25:24 PM	PH3 valve closed
4/5/2010	8:25:24 PM	SiCl4 pre valve closed
4/5/2010	8:25:24 PM	SiCl4 post valve closed
4/5/2010	8:25:24 PM	Main Vac valve closed
4/5/2010	8:25:25 PM	Bypass valve closed
4/5/2010	8:25:25 PM	H2 valve opened
4/5/2010	8:25:25 PM	Bubbler valve opened
4/5/2010	8:25:25 PM	Helium MFC set to  0.000000
4/5/2010	8:25:25 PM	H2 MFC set to  500.000000
4/5/2010	8:25:25 PM	BCl3 MFC set to  0.000000
4/5/2010	8:25:25 PM	SiCl4 MFC set to  0.000000
4/5/2010	8:25:25 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	8:25:25 PM	Tube furnace set to 0
4/5/2010	8:32:15 PM	Run aborted at 8:32 PM
4/5/2010	8:32:15 PM	Helium valve closed
4/5/2010	8:32:15 PM	H2 valve closed
4/5/2010	8:32:15 PM	BCl3 valve closed
4/5/2010	8:32:15 PM	PH3 valve closed
4/5/2010	8:32:15 PM	SiCl4 pre valve closed
4/5/2010	8:32:15 PM	SiCl4 post valve closed
4/5/2010	8:32:15 PM	Bypass valve closed
4/5/2010	8:32:15 PM	Main Vac valve closed
4/5/2010	8:32:15 PM	Bubbler valve closed
4/5/2010	8:32:15 PM	Helium MFC set to  0.000000
4/5/2010	8:32:15 PM	H2 MFC set to  0.000000
4/5/2010	8:32:15 PM	BCl3 MFC set to  0.000000
4/5/2010	8:32:15 PM	SiCl4 MFC set to  0.000000
4/5/2010	8:32:15 PM	Tube furnace set to 0
4/5/2010	8:32:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/5/2010	8:32:59 PM	Recipe started at 8:32 PM
4/5/2010	8:32:59 PM	Helium valve closed
4/5/2010	8:32:59 PM	H2 valve closed
4/5/2010	8:32:59 PM	BCl3 valve closed
4/5/2010	8:32:59 PM	PH3 valve closed
4/5/2010	8:32:59 PM	SiCl4 pre valve closed
4/5/2010	8:32:59 PM	SiCl4 post valve closed
4/5/2010	8:32:59 PM	Main Vac valve closed
4/5/2010	8:32:59 PM	Bypass valve closed
4/5/2010	8:32:59 PM	Bubbler valve closed
4/5/2010	8:32:59 PM	Helium MFC set to  0.000000
4/5/2010	8:32:59 PM	H2 MFC set to  0.000000
4/5/2010	8:32:59 PM	BCl3 MFC set to  0.000000
4/5/2010	8:32:59 PM	SiCl4 MFC set to  0.000000
4/5/2010	8:32:59 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	8:33:00 PM	Tube furnace set to 0
4/5/2010	8:33:00 PM	Run finished at 8:33 PM
4/5/2010	8:33:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/5/2010	8:33:05 PM	SiCl4 MFC set to  200.000000
4/5/2010	8:37:11 PM	SiCl4 pre valve opened
4/5/2010	8:52:19 PM	SiCl4 pre valve closed
4/5/2010	8:53:01 PM	SiCl4 pre valve opened
4/5/2010	8:53:15 PM	SiCl4 pre valve closed
4/5/2010	8:53:16 PM	SiCl4 pre valve opened
4/5/2010	8:53:19 PM	SiCl4 pre valve closed
4/5/2010	8:53:21 PM	SiCl4 pre valve opened
4/5/2010	8:53:25 PM	SiCl4 pre valve closed
4/5/2010	8:53:39 PM	SiCl4 pre valve opened
4/5/2010	8:54:42 PM	SiCl4 pre valve closed
4/5/2010	8:54:44 PM	SiCl4 pre valve opened
4/5/2010	8:54:50 PM	SiCl4 pre valve closed
4/5/2010	8:54:56 PM	SiCl4 pre valve opened
4/5/2010	8:55:06 PM	SiCl4 pre valve closed
4/5/2010	8:55:08 PM	SiCl4 pre valve opened
4/5/2010	8:55:10 PM	SiCl4 pre valve closed
4/5/2010	8:55:10 PM	SiCl4 pre valve opened
4/5/2010	8:55:13 PM	SiCl4 pre valve closed
4/5/2010	8:55:13 PM	SiCl4 pre valve opened
4/5/2010	8:55:20 PM	SiCl4 pre valve closed
4/5/2010	9:01:16 PM	SiCl4 pre valve opened
4/5/2010	9:01:22 PM	SiCl4 pre valve closed
4/5/2010	9:03:56 PM	SiCl4 MFC set to  250.000000
4/5/2010	9:04:10 PM	SiCl4 pre valve opened
4/5/2010	9:07:52 PM	SiCl4 MFC set to  0.000000
4/5/2010	9:07:53 PM	SiCl4 pre valve closed
4/5/2010	9:08:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2010	9:09:00 PM	Recipe started at 9:09 PM
4/5/2010	9:09:00 PM	H2 valve closed
4/5/2010	9:09:00 PM	BCl3 valve closed
4/5/2010	9:09:00 PM	PH3 valve closed
4/5/2010	9:09:00 PM	SiCl4 pre valve closed
4/5/2010	9:09:00 PM	SiCl4 post valve closed
4/5/2010	9:09:00 PM	Main Vac valve closed
4/5/2010	9:09:00 PM	Bypass valve closed
4/5/2010	9:09:00 PM	Bubbler valve closed
4/5/2010	9:09:00 PM	Helium valve opened
4/5/2010	9:09:00 PM	Helium MFC set to  500.000000
4/5/2010	9:09:00 PM	H2 MFC set to  0.000000
4/5/2010	9:09:00 PM	BCl3 MFC set to  0.000000
4/5/2010	9:09:00 PM	SiCl4 MFC set to  0.000000
4/5/2010	9:09:00 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	9:09:00 PM	Tube furnace set to 0
4/5/2010	9:09:07 PM	Helium valve closed
4/5/2010	9:09:07 PM	H2 valve closed
4/5/2010	9:09:07 PM	BCl3 valve closed
4/5/2010	9:09:07 PM	PH3 valve closed
4/5/2010	9:09:07 PM	SiCl4 pre valve closed
4/5/2010	9:09:07 PM	SiCl4 post valve closed
4/5/2010	9:09:07 PM	Main Vac valve closed
4/5/2010	9:09:07 PM	Bypass valve closed
4/5/2010	9:09:07 PM	Bubbler valve closed
4/5/2010	9:09:07 PM	Helium MFC set to  0.000000
4/5/2010	9:09:07 PM	H2 MFC set to  0.000000
4/5/2010	9:09:07 PM	BCl3 MFC set to  0.000000
4/5/2010	9:09:07 PM	SiCl4 MFC set to  0.000000
4/5/2010	9:09:07 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	9:09:07 PM	Tube furnace set to 0
4/5/2010	9:09:07 PM	Run finished at 9:09 PM
4/5/2010	9:09:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2010	9:09:13 PM	Helium valve opened
4/5/2010	9:09:21 PM	Helium MFC set to  250.000000
4/5/2010	9:09:30 PM	Bubbler valve opened
4/5/2010	9:20:31 PM	SiCl4 pre valve opened
4/5/2010	9:20:43 PM	Bubbler valve closed
4/5/2010	9:20:51 PM	Bubbler valve opened
4/5/2010	9:21:27 PM	Bubbler valve closed
4/5/2010	9:21:29 PM	Helium valve closed
4/5/2010	9:29:11 PM	Helium valve opened
4/5/2010	9:29:55 PM	Helium valve closed
4/5/2010	9:30:01 PM	SiCl4 pre valve closed
4/5/2010	9:33:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2010	9:33:30 PM	Recipe started at 9:33 PM
4/5/2010	9:33:30 PM	Helium valve closed
4/5/2010	9:33:30 PM	H2 valve closed
4/5/2010	9:33:30 PM	BCl3 valve closed
4/5/2010	9:33:30 PM	PH3 valve closed
4/5/2010	9:33:30 PM	SiCl4 pre valve closed
4/5/2010	9:33:30 PM	SiCl4 post valve closed
4/5/2010	9:33:30 PM	Main Vac valve closed
4/5/2010	9:33:30 PM	Bubbler valve closed
4/5/2010	9:33:30 PM	Bypass valve opened
4/5/2010	9:33:30 PM	Helium MFC set to  0.000000
4/5/2010	9:33:30 PM	H2 MFC set to  0.000000
4/5/2010	9:33:30 PM	BCl3 MFC set to  0.000000
4/5/2010	9:33:30 PM	SiCl4 MFC set to  0.000000
4/5/2010	9:33:30 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	9:33:30 PM	Tube furnace set to 0
4/5/2010	9:33:52 PM	Helium valve closed
4/5/2010	9:33:52 PM	H2 valve closed
4/5/2010	9:33:52 PM	BCl3 valve closed
4/5/2010	9:33:52 PM	PH3 valve closed
4/5/2010	9:33:52 PM	SiCl4 pre valve closed
4/5/2010	9:33:52 PM	SiCl4 post valve closed
4/5/2010	9:33:52 PM	Bubbler valve closed
4/5/2010	9:33:52 PM	Main Vac valve opened
4/5/2010	9:33:52 PM	Bypass valve opened
4/5/2010	9:33:52 PM	Helium MFC set to  0.000000
4/5/2010	9:33:52 PM	H2 MFC set to  0.000000
4/5/2010	9:33:52 PM	BCl3 MFC set to  0.000000
4/5/2010	9:33:52 PM	SiCl4 MFC set to  0.000000
4/5/2010	9:33:52 PM	Bypass solenoid MFC set to  0.000000
4/5/2010	9:33:52 PM	Tube furnace set to 0
4/5/2010	9:33:53 PM	Run finished at 9:33 PM
4/5/2010	9:33:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
